TUNABLE MULTI-ZONE GAS INJECTION SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a system and a method for gas injection that improve the uniformity and efficiency of plasma treatment. SOLUTION: The system includes: a plasma treatment chamber 10; a vacuum pump, a substrate support 12; a dielectric member 20 facing the substrate support; a gas injector 22; an RF energy source 19; an antenna 18 or the like. The antenna inductively couples energy from the RF energy source with a treatment gas through the dielectric member to form a plasma state and to treat a substrate. The gas injector includes an on-axis exhaust port in a central area and an off-axis exhaust port in an annular area around the central area. The gas injector also includes a plurality of gas injecting ports which can independently supply various amounts of the treatment gases in a variable manner. This arrangement allows the independent adjustment of a gas flow to a plurality of zones in the chamber and various desired changes in gas supply. By using the plasma system, these problems can be solved. COPYRIGHT: (C)2011,JPO&INPIT