ELECTRODE PATTERNING FOR DIFFERENTIAL PZT ACTIVATOR

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing process of a differential piezoelectric activator, which is simple and requires a cost lower than that of conventional manufacturing process.

SOLUTION: A piezoelectric element 200 is formed of a piezoelectric substrate having top and bottom electrodes formed thereon. The top electrode 202 has a discontinuous part 208 which is formed therein and separates the top electrode 202 into two portions 202a and 202b that are electrically isolated from each other. Each piezoelectric element 200 has a wrap-around electrode 206 to be used in a differential activator design where electrical connection is made to a bottom surface of the element 200 from the top surface 202 of the element 200. The wrap-around electrode 206 is formed during the creation of the elements 200 instead of on an element by element basis.

COPYRIGHT: (C)2011,JPO&INPIT