ALUMINUM NITRIDE SINGLE CRYSTAL, METHOD FOR PRODUCING THE SAME, AND APPARATUS FOR PRODUCING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method for producing an aluminum nitride single crystal by which an aluminum nitride single crystal having good quality can be produced with good productivity while a crystal growth rate is stabilized for a long time. SOLUTION: The method for producing an aluminum nitride single crystal 24 by a gas phase method is carried out in an apparatus including a raw material gas generating vessel 11 connected to a growth vessel 2 and having a nitrogen gas inlet 17, a feeder 13 disposed on an upper face of the raw material gas generating vessel 11, and a raw material hopper 12 disposed on an upper face of the feeder 13 and continuously supplying the raw material 21. The method comprises: supplying a raw material 21 prepared by mixing aluminum oxide powders and carbon powders to the raw material gas generating vessel 11; heating the raw material gas generating vessel 11 to produce Al gas; transporting the Al gas and nitrogen supplied to the raw material gas generating vessel 11 from a nitrogen gas inlet 17, into the growth vessel 2; and continuously growing an aluminum nitride single crystal 24 in the growth section of the growth vessel 2. COPYRIGHT: (C)2011,JPO&INPIT