| 摘要 |
An ion-plasma plant relates to technology equipment for application of bimetal coatings with laminar nano-structure of different composition and purpose. Essential feature of plant is use of two coaxial magnetron sprays of radial type with conic cathodes. The magnetron sprays mounted on axis of vacuum chamber with possibility regulation of distance between their. The details are fixed on rotary holder, on which coating is applied. The value of diameter of assembly surface of rotary holder can be adjusted. The holder with details has possibility of planetary and reciprocating moving relative to rotation axis. Present is possibility of regulation of the ratio of distance between magnetron sprays and diameter of assembly surface of holder of details. The plant allows carrying out joint processing of details or application of coatings on internal surface of pipe articles, to increase quality of laminar coatings. |
