发明名称 SOLID-STATE IMAGE PICKUP ELEMENT AND A METHOD OF MANUFACTURING THE SAME, AND IMAGE PICKUP DEVICE INCLUDING THE SAME
摘要 PURPOSE: A solid image taking device, a method for manufacturing the same, and an image taking device including the same are provided to stabilize an electrical signal obtained from photoelectric transformation in the solid image taking device. CONSTITUTION: A photo-diode(41) implementing photoelectric transformation is formed on a silicon substrate(2). A first film(21) is formed on the semiconductor layer using either of an atomic layer deposition method and an organic metal chemical-vapor-deposition method. The first film includes a fixed negative electric charge. A second film(22) is formed on the first film using a physical vapor deposition method. A third film(23) is formed on the second film using either of the atomic layer deposition method or an organic metal chemical-vapor-deposition method.
申请公布号 KR20110014093(A) 申请公布日期 2011.02.10
申请号 KR20100071805 申请日期 2010.07.26
申请人 SONY CORPORATION 发明人 OSHIYAMA ITARU;MIYATA EIJI
分类号 H01L27/148;H01L27/14 主分类号 H01L27/148
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