摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical member having an oxide layer with a stabilized micro uneven structure and excellent durability, and a method of manufacturing the optical member. <P>SOLUTION: The optical member has a base material 21 and an anti-reflection film on the surface of the base material. The anti-reflection film has a metal oxide layer having a micro uneven structure on the surface due to aluminum oxide crystals. The metal oxide layer contains an amorphous layer 23, and at least the surface of the metal oxide layer is aluminum phosphate 25. The height of the micro uneven structure is 0.1-5 μm. Alternately, the aluminum oxide crystals are boehmite. <P>COPYRIGHT: (C)2011,JPO&INPIT |