| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical disk-manufacturing apparatus which can provide a highly reliable optical disk coping with high recording density, or an optical disk such as a DVD and a CD. SOLUTION: The optical disk-manufacturing apparatus includes a rotation processor 2 for spreading a liquid film-forming substance supplied by a nozzle member 3F on a disk substrate D with a centrifugal force by high-speed rotation, and an arm member 3C for supporting the nozzle member 3F. A liquid film-forming substance on-off valve 3D which opens and closes between the liquid film-forming substance supply mechanism 4 and the nozzle member 3F selectively, and a filtration member 3E attached removably to an effluence section of the liquid film-forming substance in the liquid film-forming substance on-off valve 3D are provided at a tip part of the arm member 3C. The nozzle member 3F is attached to the effluence section of the filtration member 3E, and even a particle generated in the liquid film-forming substance supply mechanism 4 can be removed, thereby enabling high quality liquid film to be formed on the disk substrate D. COPYRIGHT: (C)2011,JPO&INPIT
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