发明名称 Drucksensor und Verfahren zum Herstellen eines Drucksensors
摘要 An inexpensive and simple pressure sensor having good static pressure characteristics is provided. In a pressure sensor including a base having a hole to which a pressure is applied and performing electrical and mechanical insulation, and a sensor having a diaphragm connected to the hole and a strain gauge for converting a strain occurring in the diaphragm to an electric signal, the sensor being mounted to the base, the base is formed with such a thickness that the strain at the time of applying a static pressure does not change.
申请公布号 DE102005004793(B4) 申请公布日期 2011.02.10
申请号 DE20051004793 申请日期 2005.02.02
申请人 YOKOGAWA ELECTRIC CORPORATION 发明人 KATO, SATOSHI;SARUYA, TOSHIYUKI
分类号 G01L9/00;G01L9/06;G01L7/08;G01L19/06;H01L29/84 主分类号 G01L9/00
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