发明名称 |
Drucksensor und Verfahren zum Herstellen eines Drucksensors |
摘要 |
An inexpensive and simple pressure sensor having good static pressure characteristics is provided. In a pressure sensor including a base having a hole to which a pressure is applied and performing electrical and mechanical insulation, and a sensor having a diaphragm connected to the hole and a strain gauge for converting a strain occurring in the diaphragm to an electric signal, the sensor being mounted to the base, the base is formed with such a thickness that the strain at the time of applying a static pressure does not change. |
申请公布号 |
DE102005004793(B4) |
申请公布日期 |
2011.02.10 |
申请号 |
DE20051004793 |
申请日期 |
2005.02.02 |
申请人 |
YOKOGAWA ELECTRIC CORPORATION |
发明人 |
KATO, SATOSHI;SARUYA, TOSHIYUKI |
分类号 |
G01L9/00;G01L9/06;G01L7/08;G01L19/06;H01L29/84 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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