| 摘要 |
PROBLEM TO BE SOLVED: To properly form a coating on a film of a releasing agent formed on the surface of a template. SOLUTION: The template treatment apparatus 1 has a configuration composed by integrally connecting a template carry-in and carry-out station 2 and a treatment station 3. The template carry-in and carry-out station 2 can hold a plurality of templates T and carry-in and carry-out the templates T to the treatment station 3. The treatment station 3 transports the templates T along a transport line A. In the transport line A, a pre-washing unit 21, a releasing agent coating unit 22, a heating unit 23, a temperature adjustment unit 24, a rinsing unit 25, and a resist coating unit 26 for carrying out prescribed treatments for the templates T during the transportation are arranged in the order in the transportation direction of the templates T. In the resist coating unit 26, a resist solution is supplied to the surfaces of the templates T and resist films are formed on the surfaces of the templates T by using a squeezee. COPYRIGHT: (C)2011,JPO&INPIT
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