| 摘要 |
<p>Provided is a laser machining method by which a precisely modified region can be stably formed in an object to be machined. The laser beam (L) is modulated by a spatial light modulator and is converged onto the object to be machined. Upon convergence, the position of the laser beam (L) is detected and the position of a modulation pattern (H) in the spatial light modulator is changed on the basis of the detected position of the laser beam (L). Therefore, even if the position of the laser beam (L) incident upon the spatial light modulator is deviated, or the like, it is possible to change the position of the modulation pattern (H) in accordance with the deviation, so that the laser beam (L) can be always appropriately modulated by the spatial light modulator. Thus, it is possible to stably suppress aberrations of the laser beam (L) converged onto the object to be machined.</p> |
