| 摘要 |
PURPOSE: A domed shower head is provided, which minimizes loss due to process failure and productivity degradation and improves yield of a wafer. CONSTITUTION: A domed shower head is constituted as follows. A blocker plate(3) decentralizes process gas provided through a gas supply line(2) and reduces pressure. In the surface of the shower head, a plurality of holes passing through water are formed. More holes are formed in the outer circumference than the central part. In the circular lower part, a curved part is formed and collects gas which is unable to pass through a hole. |
