| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a highly efficient manufacturing method of a piezoelectric vibrator, and to provide a piezoelectric vibrator. <P>SOLUTION: There is provided the method for manufacturing the piezoelectric vibrator 1 including a base board 2 and a lid board 3 which are superimposed on each other so as to form a cavity therebetween, a piezoelectric vibrating reed 4 which is accommodated in the cavity and bonded to the base board, a bonding film 35 which is formed on the entire surface of the lid board on the side opposite to the base board so as to bond both boards to each other at a portion thereof in contact with the base board, wherein the piezoelectric vibrating reed includes a pair of vibrating arms 10 and 11 and a weight metal film 21 formed on a tip end of each of the vibrating arms, wherein the bonding film is formed of a material which is capable of absorbing a surrounding gas by being activated with laser irradiation, and wherein the method includes a laser irradiation step of simultaneously irradiating the weight metal film and the bonding film with a laser beam. <P>COPYRIGHT: (C)2011,JPO&INPIT |
