| 摘要 |
PROBLEM TO BE SOLVED: To improve accuracy of SFE calibration. SOLUTION: A calibration device 20 includes a temperature sensor 22, a controller 23, a heater 24, and a cooler 25. The temperature sensor 22 detects the temperature in a calibration chamber 21r. The controller 23 generates heater control data or cooler control data by using the detected temperature and prescribed set temperature respectively as an input value and a target value. The heater 24 generates heat, based on the heater control data, so as to heat the calibration chamber 21r. The cooler 25 cools the calibration chamber 21r, based on the cooler control data. COPYRIGHT: (C)2011,JPO&INPIT |
