| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for evaluating a ferroelectric film capable of discriminating the cause of a crack, and to provide a method for manufacturing a liquid jet head using the same, by which feedback can be instantly applied to the manufacturing process. <P>SOLUTION: The method for evaluating the ferroelectric film includes a step of generating a leak in the ferroelectric film by applying a voltage to the ferroelectric film formed between a pair of electrodes, and a step of evaluating the ferroelectric film by measuring the number of generated leaks for evaluation based on the number of generated leaks. The method for manufacturing the liquid jet head includes a step of performing evaluation for the ferroelectric film after a piezoelectric element formation step, and a step of forming a pressure generating room if the evaluation of the ferroelectric film is good. <P>COPYRIGHT: (C)2011,JPO&INPIT |
