| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem of dust generated in driving a fall-off preventing mechanism required for a substrate carrier to prevent a semiconductor substrate and the substrate holder for holding the semiconductor substrate from falling off due to vibration or the like generated in carrying the substrate. SOLUTION: The substrate carrier that carries the substrate holder for holding the substrate includes a mounting part on which the substrate holder is mounted, a rotary shaft disposed on the same side as the mounting part relative to the substrate that the substrate holder mounted on the mounting part holds, an open/close lock mechanism that axially rotates around the rotary shaft and may occupy a preventing position that prevents the substrate holder from falling off and an open position that opens the substrate holder, and a turning part that integrally turns the mounting part, the rotary shaft and the open/close lock mechanism upside down. COPYRIGHT: (C)2011,JPO&INPIT
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