发明名称 DROPLET DISCHARGE APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a simple droplet discharge apparatus having the cooling function and air sending function of a light source. SOLUTION: The droplet discharge apparatus for discharging droplets 28 to a substrate 7 from a nozzle has a stage and a carriage both of which relatively move the nozzle and the substrate 7, an air blower 35 for fluidizing air to form air streams 39, a flow channel part 38 for allowing the air streams 39 flowing out of the air blower 35 to flow, an irradiation device 44 for irradiating the droplets 28 arriving at the substrate 7 with ultraviolet rays 44a and a first blowoff port 22 for blowing the air streams 39 passed through the flow channel part 38 against the liquid droplets 28 arriving at the substrate 7. The flow channel part 38 supplies the air streams 39 to the irradiation device 44 and the first blowoff port 22. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011025164(A) 申请公布日期 2011.02.10
申请号 JP20090173992 申请日期 2009.07.27
申请人 SEIKO EPSON CORP 发明人 SUKAI KEIGO
分类号 B05C9/14;B05C5/00;B05C11/06 主分类号 B05C9/14
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