发明名称 |
Micromechanical component, light-deflecting device, and manufacturing methods for a micromechanical component and a light-deflecting device |
摘要 |
A micromechanical component includes: a mirror element with a reflective surface on a first outer side of the mirror element, which is designed in such a way that a first potential is applied to a first electrode surface on a second outer side of the mirror element opposite from the first outer side; a counterelectrode situated adjacent to the second outer side of the mirror element and which is designed in such a way that a second potential is applied to a second electrode surface of the counterelectrode; and a voltage control unit configured to apply a temporally varying voltage signal between the first electrode surface and the second electrode surface
|
申请公布号 |
US2011032591(A1) |
申请公布日期 |
2011.02.10 |
申请号 |
US20100804490 |
申请日期 |
2010.07.21 |
申请人 |
FIESS REINHOLD;MUCHOW JOERG |
发明人 |
FIESS REINHOLD;MUCHOW JOERG |
分类号 |
G02B26/08;G02B26/00;H05K13/00 |
主分类号 |
G02B26/08 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|