发明名称 Micromechanical component, light-deflecting device, and manufacturing methods for a micromechanical component and a light-deflecting device
摘要 A micromechanical component includes: a mirror element with a reflective surface on a first outer side of the mirror element, which is designed in such a way that a first potential is applied to a first electrode surface on a second outer side of the mirror element opposite from the first outer side; a counterelectrode situated adjacent to the second outer side of the mirror element and which is designed in such a way that a second potential is applied to a second electrode surface of the counterelectrode; and a voltage control unit configured to apply a temporally varying voltage signal between the first electrode surface and the second electrode surface
申请公布号 US2011032591(A1) 申请公布日期 2011.02.10
申请号 US20100804490 申请日期 2010.07.21
申请人 FIESS REINHOLD;MUCHOW JOERG 发明人 FIESS REINHOLD;MUCHOW JOERG
分类号 G02B26/08;G02B26/00;H05K13/00 主分类号 G02B26/08
代理机构 代理人
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