| 摘要 |
PURPOSE: A capacitive acceleration sensor with a single micro electro mechanical system is provided to accurately sense an acceleration direction and the size of an acceleration. CONSTITUTION: A plurality of sensing electrodes(21-26) surrounds a central electrode(10) with a preset space. Sensing electrodes are comprised of the same electrodes on the inner sidewall of a cylindrical silicon cavity(30). A silicon column is integrated with a silicon substrate(40). |
