| 摘要 |
PURPOSE: An array testing apparatus equipped with an optic chuck cleaner for decreasing the generation rate of error is provided to remove the foreign material of the optic chuck by the cleaner in an array test process. CONSTITUTION: An array test apparatus(100) includes an optic chuck(50), a modulator(20), a light source and a cleaner(200). A test target substrate is settled on the optic chuck. The modulator is settled on one side of the optic chuck. The light source is arranged in the other side of the optic chuck. The light source examines the light to the modulator. The cleaner removes the foreign substance of the optic chuck. A loading unit loads the substrate. An unloading unit(80) unloads the substrate to the outside of the array test apparatus. |
