| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aligner, along with a lighting power control method of a lamp used therefor, capable of preventing secular degradation of brightness of a lamp even if illumination time of the lamp becomes longer, for suppressed degradation of illuminance at exposure surface, resulting in suppressed degradation of throughput of the aligner. <P>SOLUTION: The aligner includes a lamp in which a pair of electrodes are arranged to face each other inside an arc tube and mercury is sealed up, a lamp power supply which supplies power to the lamp, and a shutter for opening/closing the light radiated from the lamp. The lamp is continuously lit, and when the shutter is opened a workpiece is exposed with the light radiated from the lamp, and when the shutter is closed the workpiece is replaced or position is adjusted. The lamp power supply, if detects elongation of distance between electrodes of the lamp when the shutter is closed, executes a power modulation process to correct elongation of inter-electrode distance. <P>COPYRIGHT: (C)2011,JPO&INPIT |
