| 摘要 |
A grazing incidence interferometer includes: a beam splitting section configured to split a beam from a beam source section into a measuring beam emergent to a measurement surface and a reference beam serving as a measurement reference, and configured to cause the measuring beam to emerge obliquely to the measurement surface; a beam combining part configured to combine the reference beam and the measuring beam reflected at the measurement surface, to obtain a combined beam; a detecting section configured to detect a profile of the measurement surface based on an interference fringe formed by the combined beam; and an image inverting part configured to invert an orientation of a wave front of the measuring beam or the reference beam, the image inverting part being provided in an optical path of the measuring beam or the reference beam leading from the beam splitting section to the beam combining section.
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