The development equipment of auto surface defect,pattern inspection and sort and repair of Metel Mask,申请号KR20090010198U-传众专利搜索

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发明名称	The development equipment of auto surface defect,pattern inspection and sort and repair of Metel Mask
摘要
申请公布号	KR20110001443(U)	申请公布日期	2011.02.10
申请号	KR20090010198U	申请日期	2009.08.04
申请人		发明人
分类号	H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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