| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas supply unit with easy manufacture, capable of reducing a width of a block provided with a plurality of valves. SOLUTION: A passage block 20 of the gas supply unit 11 is formed in a rectangular shape extending lengthwise, and the plurality of valves 50 is serially mounted on a top face 20a. Each valve chamber 24 of each valve 50 is provided on the top face 20a of the passage block 20. A process gas passage 22 is communicated with a substantially center of the valve chamber 24, and it is extended in a direction separating away from the top face 20a of the passage block 20 and opened in a bottom face. A carrying gas passage 21 includes side face passages 25 connected to the valve chambers 24 of adjoining valves 50 and alternately provided along a longitudinal direction of the passage block 20 on one side face 20c and another side face 20c of both side faces 20c of the passage block 20. The side face passage 25 is composed of a groove part extending along the longitudinal direction of the passage block 20 and a lid member covering a groove opening of the groove part. COPYRIGHT: (C)2011,JPO&INPIT |
