发明名称 ADJACENT FIELD ALIGNMENT
摘要 Methods for imprinting on abutted fields of a substrate are described. Generally, a first field of a substrate may be imprinted using an imprint lithography template. The template may then be placed such that a portion of the template overlaps the first field of the substrate while imprinting a second field of the substrate.
申请公布号 WO2011016849(A2) 申请公布日期 2011.02.10
申请号 WO2010US02136 申请日期 2010.07.30
申请人 MOLECULAR IMPRINTS, INC. 发明人 MCMACKIN, IAN MATTHEW;MARTIN, WESLEY
分类号 G03F7/00 主分类号 G03F7/00
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