PNEUMATIC LEVITATION-TYPE SUBSTRATE CONVEYING DEVICE

摘要

A pneumatic levitation-type substrate conveying device (1) comprises: support sections (3) arranged side-by-side with predetermined spacings therebetween in the direction perpendicular to the conveyance direction and jetting air to maintain a substrate (10) in a levitated position; and a conveyance section (6) for conveying in the conveyance direction the substrate (10) which is being levitated above the support sections (3). The pneumatic levitation-type substrate conveying device (1) is provided with a drive section (9) which , while the substrate (10) having been sent to a predetermined position by the conveyance section (6) is being levitated above the support sections (3), rotates the substrate (10) about the center thereof. Ball-equipped supports (14) for supporting the substrate (10) are provided to at least some of the positions between adjacent support sections (3), said positions being those through which the corners of the substrate (10) pass when the substrate (10) is rotated at the predetermined position. The configuration prevents the substrate (10) from being cracked or damaged, and, as a result, the throughput of products is improved.