| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an imaging optical system that appropriately obtains the outline of an object to be imaged, which is a transparent body with respect to visible light, such as a sapphire substrate, and to provide a processing apparatus by which an object to be processed, such as a sapphire substrate, is aligned using the imaging optical system. <P>SOLUTION: The imaging optical system 110 includes first and second cylindrical lenses 111 and 112 whose light refracting directions intersect each other; a mask 113 that permits the passage of only reflection light from a predetermined area where reflection light passed through the second cylindrical lens 112 form an imaging line L; an imaging lens 114 that forms an image from reflection light passed through the mask 113 from an object M to be imaged; and an imaging element 115 provided in the image forming position of the image forming lens 114. The aperture size NA1 of the first cylindrical lens 111 is greater than the aperture size NA2 of the second cylindrical lens 112. The object M to be imaged is imaged while the condensing point of the first cylindrical lens 111 is aligned to the height of the surface of the object M. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
