发明名称 PELLET POSITION RECOGNIZING DEVICE, PELLET MOUNTING DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To improve accuracy and reliability of position recognition of a pellet held by a collet. SOLUTION: A position recognizing device 1 includes a light irradiating section 2 for irradiating light. It further includes a collet 6 having a holding section 4 for holding a pellet 3 and a reflection surface 5 for reflecting light radiated from the light irradiating section 2 toward the pellet 3 held by the holding section 4. It further includes an image pickup section 7 for picking up a projected image of the pellet 3 caused by reflected light from the reflection surface 5, and an image recognizing section for recognizing the position of the pellet 3 held by the holding section 4. The light irradiating section 2 includes a light source 9, and a light converting section 10 for converting light from the light source 9 to a parallel light or a focused light so as to irradiate the converted light from one direction toward the reflection surface 5. The reflection surface 5 is a plane. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011029551(A) 申请公布日期 2011.02.10
申请号 JP20090176414 申请日期 2009.07.29
申请人 RENESAS ELECTRONICS CORP 发明人 KURODA HIDEKUNI
分类号 H01L21/52 主分类号 H01L21/52
代理机构 代理人
主权项
地址