摘要 |
PROBLEM TO BE SOLVED: To provide a thin film gas sensor which can suppress an increase in power consumption to the utmost, excluding the situation where a gas sensing layer is affected by temperature, and also being sensitive to a target gas so as not to be affected by the ambient environment. SOLUTION: In the thin film gas sensor, a heater layer is driven over a predetermined period so that the gas sensing layer becomes a target gas detecting temperature, and after the temperature is stabilized, the value of sensing layer resistance of the gas sensing layer is calculated to calculate the target gas concentration, and the heater layer is driven over a predetermined period so that the gas sensing layer becomes a carbon monoxide gas detecting temperature, and after the temperature is stabilized, the value of sensing layer resistance of the gas sensing layer is calculated to calculate the carbon monoxide gas concentration. The thin film gas sensor is thus constituted not to be affected by temperature. COPYRIGHT: (C)2011,JPO&INPIT
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