发明名称 THIN FILM GAS SENSOR
摘要 PROBLEM TO BE SOLVED: To provide a thin film gas sensor which can suppress an increase in power consumption to the utmost, excluding the situation where a gas sensing layer is affected by temperature, and also being sensitive to a target gas so as not to be affected by the ambient environment. SOLUTION: In the thin film gas sensor, a heater layer is driven over a predetermined period so that the gas sensing layer becomes a target gas detecting temperature, and after the temperature is stabilized, the value of sensing layer resistance of the gas sensing layer is calculated to calculate the target gas concentration, and the heater layer is driven over a predetermined period so that the gas sensing layer becomes a carbon monoxide gas detecting temperature, and after the temperature is stabilized, the value of sensing layer resistance of the gas sensing layer is calculated to calculate the carbon monoxide gas concentration. The thin film gas sensor is thus constituted not to be affected by temperature. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011027752(A) 申请公布日期 2011.02.10
申请号 JP20100249337 申请日期 2010.11.08
申请人 FUJI ELECTRIC SYSTEMS CO LTD;OSAKA GAS CO LTD 发明人 KOBAYASHI MITSUO;OKAMURA MAKOTO;SUZUKI TAKUYA;KUNIHARA KENJI;TABATA SOICHI;ONISHI HISAO;HIGAKI KATSUMI
分类号 G01N27/12 主分类号 G01N27/12
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