| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor with improved reliability without continuing output of an output signal with no correspondence to an angular velocity when a circuit pattern surrounding a sense electrode is disconnected. <P>SOLUTION: The angular velocity sensor includes: a first voltage source 77 for injecting a charge between a first sense electrode 34 and a first integration circuit 56, through a first disconnection detection switch 78; and a second voltage source 79 for injecting a charge between a second sense electrode 35 and a second integration circuit 67, through a second disconnection detection switch 80. <P>COPYRIGHT: (C)2011,JPO&INPIT |
