| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a compact flow control device capable of improving the accuracy of flow rate. <P>SOLUTION: The flow control device 1 controls a flow rate by controlling a valve opening of a fluid control valve 3 based on a flow measurement value of a thermal flowmeter 2. A sensor body 11 and a valve body 41 are brought into contact with each other by surface in a manner that connects an outflow port 23 and an input port 42, thereby integrating the thermal flowmeter 2 and the fluid control valve 3. Then, an orifice member 31 provided with an orifice flow channel 33 narrowing down a flow rate is attached to the outflow port 23 of the sensor body 11 to incorporate the orifice member 31 in the thermal flowmeter 2. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
