| 摘要 |
PROBLEM TO BE SOLVED: To achieve an increase in the size of an apparatus without reducing the thermal efficiency as well as to heat a supplied gas with high thermal efficiency, therefore to attain mass production. SOLUTION: The apparatus for producing trichlorosilane has a heating mechanism 2 to heat the interior of a reaction vessel 1, a gas supply part 3 and a gas discharge part 4, wherein the heating mechanism 2 comprises electrode parts 31 arranged in an inner bottom part of the reaction vessel 1 and connected to an external power source, and heater parts 32 held by the electrode parts 31 and set up along the vertical direction in the reaction vessel 1. In the reaction vessel 1, there is provided a gas dispersion plate 17 which divides the internal space of the reaction vessel 1 into a reaction chamber 23 wherein the heater parts 32 are arranged and a gas introduction chamber 21 wherein the electrode parts 31 are arranged under the reaction chamber 23, and which keeps the reaction chamber 23 and the gas introduction chamber 21 in communication with each other by a plurality of through-holes 19. The gas supply part 3 is connected so that a raw material gas is supplied to the reaction chamber 23 through the gas introduction chamber 21. COPYRIGHT: (C)2011,JPO&INPIT
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