| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a support base incorporating a heater, wherein disconnection of the heater due to reaction with a reactive gas is prevented without causing increase in cost. <P>SOLUTION: The support base 17 is for supporting a workpiece in a chamber supplied with the reactive gas. The support base includes a pair of plates 18a and 18b, and the heater 19 provided therebetween. An air vent 21 penetrating its top and reverse surfaces, an introduction groove 22 communicating with the air vent 21, an air vent groove 23 communicating with the introduction groove 22, and a buried groove 24 which communicates with one of the introduction groove 22 and air vent groove 23 and is narrower in width than the air vent groove 23, are formed in one of the plates 18a and 18b. The heater 19 is buried in the introduction groove 22, air vent groove 23, and buried groove 24 and connected to electric wiring 20 through the air vent 21, and a non-heat-generation part 19b at a part, buried in the introduction groove 22, is formed at least on the side of the air vent 21. <P>COPYRIGHT: (C)2011,JPO&INPIT |
