| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibrator which can secure a degree of vacuum in a cavity and can be manufactured with high efficiency. <P>SOLUTION: The piezoelectric vibrator 1 includes a base board 2 and a lid board 3 which are superimposed on each other so as to form a cavity C therebetween, a piezoelectric vibrating reed 4 which is accommodated in the cavity and bonded to the base board, a gettering material 34 which is formed in the base board to be accommodated in the cavity, a bonding film 35 which is formed on the entire surface of the lid board facing the base board so as to bond both boards to each other at a portion thereof in contact with the base board, wherein the bonding film is formed of a material which is capable of absorbing a surrounding gas by being activated with laser irradiation. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
