| 摘要 |
PROBLEM TO BE SOLVED: To provide a mass spectroscope capable of improving damages of a sample without lowering a secondary ion yield. SOLUTION: The mass spectroscope for analyzing secondary ions and neutral secondary particles ionized afterward to be analyzed is provided with an ion source for making primary ion beams for generating secondary particles by irradiating the sample, and an analyzing unit for mass spectrometry of the secondary particles, and is also provided with a function capable of controlling kinetic energy per atom structuring a primary ion in a range of 20 eV or less. As the primary ions, gas cluster ions formed of gas atoms condensed by Van der Waals' forces are preferably used. COPYRIGHT: (C)2011,JPO&INPIT
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