| 发明名称 |
COATING COMPOSITIONS FOR USE WITH AN OVERCOATED PHOTORESIST |
| 摘要 |
Cyanurate compositions are provided that are particularly useful as a reagent to form a resin component of a coating composition underlying an overcoated photoresist. Preferred isocyanurates compound comprise substitution of multiple cyanurate nitrogen ring atoms by at least two distinct carboxy and/or carboxy ester groups.
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| 申请公布号 |
US2011033800(A1) |
申请公布日期 |
2011.02.10 |
| 申请号 |
US20100782350 |
申请日期 |
2010.05.18 |
| 申请人 |
ROHM AND HAAS ELECTRONIC MATERIALS LLC |
发明人 |
ZAMPINI ANTHONY;JAIN VIPUL;LIU CONG;COLEY SUZANNE;ONGAYI OWENDI |
| 分类号 |
G03F7/004;C07D251/34;C08G73/08;G03F7/20 |
主分类号 |
G03F7/004 |
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