VALUATION METHOD OF DIELECTRIC BREAKDOWN LIFETIME OF GATE INSULATING FILM, VALUATION DEVICE OF DIELECTRIC BREAKDOWN LIFETIME OF GATE INSULATING FILM AND PROGRAM FOR EVALUATING DIELECTRIC BREAKDOWN LIFETIME OF GATE INSULATING FILM

摘要

A valuation method of a dielectric breakdown lifetime of a gate insulating film for evaluating the dielectric breakdown lifetime of the gate insulating film of a MOS type element includes the steps of: deciding a Weibull slope of lifetime distribution until reaching a soft breakdown of the gate insulating film of the MOS type element; deciding a detection condition of the soft breakdown from the decided Weibull slope after the above step; and executing a dielectric breakdown test by using the decided detection condition.