CANTILEVER EXCITATION DEVICE AND SCANNING PROBE MICROSCOPE

摘要

Disclosed is a cantilever excitation device which can prevent the complication of resonance characteristics by a simple configuration. Specifically disclosed is a cantilever excitation device (1) provided with a cantilever (7), a cantilever holder (3) for holding the cantilever (7), and a piezoelectric vibrator (5) attached to the cantilever holder (3). The cantilever holder (3) comprises a holder main part (11) (first part) which has an acoustic impedance different from that of the piezoelectric vibrator (5) and transmits the vibration of the piezoelectric vibrator by elastic deformation, and an attachment piece (13) (second part) which has an acoustic impedance different from that of the first part and forms, between the first part and the second part, a material boundary that blocks the propagation of an acoustic wave. The first part and the second part are disposed between the piezoelectric vibrator (5) and the cantilever (7).