INTEGRATED THIN FILM METROLOGY SYSTEM USED IN A SOLAR CELL PRODUCTION LINE

摘要

Embodiments of the present invention generally relate to systems, apparatuses, and methods used to form solar cell devices using processing modules adapted to perform one or more processes in the formation of the solar cell devices. In one embodiment, the system provides an inline inspection system of solar cell devices within a solar cell production line while collecting and using metrology data to diagnose, tune, or improve production line processes during manufacture of solar cell devices. In one embodiment, the inspection system provides an on-the-fly characterization module positioned downstream from one or more processing tools wherein the characterization module is configured to measure on-the-fly one or more properties of one or more photovoltaic layers formed on a substrate surface and a system controller in communication with the characterization module and the one or more processing tools, where the system controller is configured to analyze information received from the characterization module.