发明名称 |
PREPARATION OF LANTHANIDE-CONTAINING PRECURSORS AND DEPOSITION OF LANTHANIDE-CONTAINING FILMS |
摘要 |
Methods and compositions for depositing rare earth metal-containing layers are described herein. In general, the disclosed methods deposit the precursor compounds comprising rare earth-containing compounds using deposition methods such as chemical vapor deposition or atomic layer deposition. The disclosed precursor compounds include a cyclopentadienyl ligand having at least one aliphatic group as a substituent and an amidine ligand. |
申请公布号 |
KR20110014179(A) |
申请公布日期 |
2011.02.10 |
申请号 |
KR20107027175 |
申请日期 |
2009.06.05 |
申请人 |
L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE |
发明人 |
PALLEM VENKATESWARA R.;DUSSARRAT CHRISTIAN |
分类号 |
C23C16/18;C07C257/14;C23C16/40;H01L21/205 |
主分类号 |
C23C16/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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