| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for cutting a workpiece with high accuracy along a predetermined cutting line without depending on the material of a workpiece being an object to be cut. <P>SOLUTION: The rear surface 1b of a workpiece 1A is bonded to the surface 10a of a workpiece 10A for decoupling by anodic bonding. Thereby, a crack 17 generated in the thickness direction of the workpiece 10A for decoupling from a melting treatment area 13 as a starting point reaches the surface 1a of the workpiece 1A continuously without mostly changing the direction thereof. After the workpieces 1A and 10A are cut, the workpiece 10A is removed from the workpiece 1A to obtain a chip 19. <P>COPYRIGHT: (C)2011,JPO&INPIT |
