| 摘要 |
<p>Four Y-linear motors (36-39) for driving a stage (RST) include four stator sections (36-39) and six movable element sections (24-29). The movable element section (25) is shared by the Y-linear motors (36, 37), and the movable element section (28) is shared by the Y-linear motors (38, 39). The configuration reduces the weight of the movable section (reticle stage (RST)) of a reticle stage apparatus to enhance the acceleration of the reticle stage apparatus. The movable element sections (25, 28) located at the centers, respectively, of movable elements (30A, 30B) in the Z-axis direction are aligned with the neutral plane of the reticle stage (RST).</p> |
