| 发明名称 |
Light-sensitive 1,2-naphthoquinone-2-diazide-4-sulfonic acid monoesters and their use in light-sensitive mixtures. |
| 摘要 |
<p>Light-sensitive 1,2-naphthoquinone-2-diazide-4-sulfonic acid monoester of a cycloalkyl-substituted phenol corresponding to the formula: <CHEM> wherein n is from about 2 to about 10 and their use in light-sensitive mixtures (e.g. positive-working photoresist compositions) also containing alkali-soluble resins such as phenol-formaldehyde novolaks and cresol-formaldehyde novolaks as well as substrates ccoated therewith.</p> |
| 申请公布号 |
EP0297825(A1) |
申请公布日期 |
1989.01.04 |
| 申请号 |
EP19880305863 |
申请日期 |
1988.06.28 |
| 申请人 |
OLIN HUNT SPECIALTY PRODUCTS, INC. |
发明人 |
JEFFRIES, ALFRED TROTH, III |
| 分类号 |
C09K9/02;C07C67/00;C07C301/00;C07C309/69;C07C309/76;G03C1/72;G03F7/022;H01L21/027 |
主分类号 |
C09K9/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
