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发明名称
SEMICONDUCTOR MANUFACTURING EQUIPMENT
摘要
申请公布号
JPS6412521(A)
申请公布日期
1989.01.17
申请号
JP19870169358
申请日期
1987.07.07
申请人
NEC CORP
发明人
KANAZAWA TOMOSHI
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
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