MANUFACTURE OF SEMICONDUCTOR DEVICE,申请号JP19870318484-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH01161711(A)	申请公布日期	1989.06.26
申请号	JP19870318484	申请日期	1987.12.18
申请人	FUJITSU LTD	发明人	HASEGAWA MICHIHIKO
分类号	H01L21/20;H01L21/263	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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