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发明名称
SEMICONDUCTOR MANUFACTURING APPARATUS
摘要
申请公布号
JPH01220444(A)
申请公布日期
1989.09.04
申请号
JP19880045551
申请日期
1988.02.28
申请人
NEC KYUSHU LTD
发明人
YANABE YUKIHIRO
分类号
G03F7/16;G03F7/00;G03F7/30;H01L21/027;H01L21/30
主分类号
G03F7/16
代理机构
代理人
主权项
地址
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