发明名称 |
METHOD FOR DRAWING APPARATUS |
摘要 |
<p>PURPOSE: A control method of a coating device for controlling interval between a nozzle of a dispenser and a sensor is provided to increase the accuracy of the separation distance measurement without additional device. CONSTITUTION: A control method of a coating device is as follows. A coating material pattern on a substrate is formed by using the dispenser. The separation distance between a nozzle of a dispenser and a sensor is measured by a sensor. The separation distance rate between an optical spot and a coating material pattern is calculated according to the height of dispenser(S120). The separation distance between the optical spot and the coating material pattern is controlled.</p> |
申请公布号 |
KR20110011800(A) |
申请公布日期 |
2011.02.09 |
申请号 |
KR20090069216 |
申请日期 |
2009.07.29 |
申请人 |
AP SYSTEMS INC. |
发明人 |
KIM, KWANG HYUN;SHIN, KYOUNG CHEOL;SUNG, WON MIN;OH, SEUNG HUN |
分类号 |
B05B12/00;H01L21/027 |
主分类号 |
B05B12/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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