发明名称 METHOD FOR DRAWING APPARATUS
摘要 <p>PURPOSE: A control method of a coating device for controlling interval between a nozzle of a dispenser and a sensor is provided to increase the accuracy of the separation distance measurement without additional device. CONSTITUTION: A control method of a coating device is as follows. A coating material pattern on a substrate is formed by using the dispenser. The separation distance between a nozzle of a dispenser and a sensor is measured by a sensor. The separation distance rate between an optical spot and a coating material pattern is calculated according to the height of dispenser(S120). The separation distance between the optical spot and the coating material pattern is controlled.</p>
申请公布号 KR20110011800(A) 申请公布日期 2011.02.09
申请号 KR20090069216 申请日期 2009.07.29
申请人 AP SYSTEMS INC. 发明人 KIM, KWANG HYUN;SHIN, KYOUNG CHEOL;SUNG, WON MIN;OH, SEUNG HUN
分类号 B05B12/00;H01L21/027 主分类号 B05B12/00
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