发明名称 |
WATER-REACTIVE AL COMPOSITE MATERIAL, WATER-REACTIVE AL FILM, PROCESS FOR PRODUCTION OF THE AL FILM, AND CONSTITUENT MEMBER FOR FILM DEPOSITION CHAMBER |
摘要 |
<p>Herein disclosed are a water-reactive Al composite material which comprises 4NAI or 5NAI containing added In in an amount ranging from 2 to 5% by mass; and added Si and Si as an impurity in a total amount ranging from 0.04 to 0.6% by mass on the basis of the amount of Al; a thermally sprayed Al film prepared using this material; a method for the production of such an Al film; and a constituent member for a film-forming chamber, which is provided with this thermally sprayed Al film on the surface thereof.</p> |
申请公布号 |
EP2281915(A1) |
申请公布日期 |
2011.02.09 |
申请号 |
EP20090738774 |
申请日期 |
2009.04.27 |
申请人 |
ULVAC, INC. |
发明人 |
KADOWAKI YUTAKA;SAITOU TOMOKO;LIM KENG WENG;MUSHIAKE KATSUHIKO |
分类号 |
C23C4/06;C22C21/00;C23C4/08;C23C4/18;C23C14/00;C23C16/44 |
主分类号 |
C23C4/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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