发明名称 |
INSPECTING APPARATUS FOR WIRE |
摘要 |
PURPOSE: A wire inspection apparatus is provided to determine whether the wire is defective or not by calculating the height of the wire using the distance information between the wire and the shadow of the wire. CONSTITUTION: A lighting unit(10) emits the illuminating light having the predetermined incident angle(&thgr;1) for the perpendicular axis of a chip package(40) to cast the shadow of the wire. A photographing unit(20) is arranged with the predetermined accepting angle(&thgr;2) for the perpendicular axis of the chip package in order to get the total reflection image of the chip package surface. |
申请公布号 |
KR20110012965(A) |
申请公布日期 |
2011.02.09 |
申请号 |
KR20090070904 |
申请日期 |
2009.07.31 |
申请人 |
INTEKPLUS CO., LTD. |
发明人 |
LIM, SSANG GUN;LEE, SANG YOON;KANG, SUNG YONG;LEE, HYO JOONG |
分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|