METHOD OF FABRICATING A DEVICE USING LOW TEMPERATURE ANNEAL PROCESSES, A DEVICE AND DESIGN STRUCTURE

摘要

PURPOSE: A method for manufacturing a device, the device, and a design structure are provided to improve the performance of the device by controlling a stacking force using a low temperature annealing process. CONSTITUTION: A stress liner is formed on a gate structure(12). A stacking force is formed by processing the gate structure and the stress liner with a low temperature annealing process. A stress liner is stripped from the gate structure. An activation annealing process is executed on the gate structure.