发明名称 |
PROCESS FOR PRODUCTION OF WATER-REACTIVE Al FILM AND CONSTITUENT MEMBERS FOR FILM DEPOSITION CHAMBERS |
摘要 |
<p>Herein disclosed are a method for the production of a water-reactive Al film comprising the steps of melting a material which contains 4NAl or 5NAl as an Al raw material and added In in an amount ranging from 2 to 5% by mass on the basis of the mass of the Al raw material in such a manner that the composition of the material becomes uniform; thermally spraying the resulting molten material on the surface of a base material according to the flame spraying technique; and solidifying the sprayed molten material through quenching to thus form an Al film in which In is uniformly dispersed in Al crystalline grains; and a constituent member for a film-forming chamber, which is provided, on the surface, with the water-reactive Al film.</p> |
申请公布号 |
EP2281914(A1) |
申请公布日期 |
2011.02.09 |
申请号 |
EP20090738773 |
申请日期 |
2009.04.27 |
申请人 |
ULVAC, INC. |
发明人 |
KADOWAKI, YUTAKA;SAITOU, TOMOKO;LIM, KENG WENG;MUSHIAKE, KATSUHIKO |
分类号 |
C23C4/06;C22C21/00;C23C4/08;C23C4/12;C23C4/18;C23C14/00;C23C14/56;C23C16/44 |
主分类号 |
C23C4/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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